Poly(methyl methacrylate) degradation during x-ray photoelectron spectroscopy analysis

Journal Article · Thu Mar 01 00:00:00 EST 1990 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.576917· OSTI ID:6910106

Buchwalter, L P; Czornyj, G ^[1]

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1. IBM East Fishkill, Hopewell Junction, New York 12533 (US)

Poly(methyl methacrylate) (PMMA) was chosen as a model lithographic material to study the effect of A1 {ital K}{sub {alpha}} radiation and the thermal (flood gun) electron flux on polymer surface. The main chemical changes, which can occur in polymers by radiation, are (1) main-chain scission, (2) cross linking, and (3) volatile product formation and cyclization. The data shows that, although the flood gun electrons do not affect the PMMA surface, the x-ray radiation causes degradation in molecular weight by main-chain scission.

• OSTI ID: 6910106
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Vol. 8:2; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
POLYMERS
IRRADIATION
DATA ANALYSIS
IN-SITU PROCESSING
PHOTOIONIZATION
SAMPLE PREPARATION
X RADIATION
X-RAY EMISSION ANALYSIS
CHEMICAL ANALYSIS
ELECTROMAGNETIC RADIATION
IONIZATION
IONIZING RADIATIONS
NONDESTRUCTIVE ANALYSIS
PROCESSING
RADIATIONS
360604* - Materials- Corrosion
Erosion
& Degradation