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Title: Low-range flowmeters for use with vacuum and leak standards

Abstract

Vacuum pressure standards of the orifice-flow type require known gas flows of 10/sup -6/ mol/s (10/sup -2/ atm cm/sup 3//s at 0 /sup 0/C) and less. Known gas flows can also be used to calibrate ''standard'' leaks by comparing the pressures generated when flows from the leak and the flowmeter are alternately passed through a constant conductance. Two constant-pressure, piston displacement flowmeters developed at the National Bureau of Standards are described that can generate flows between 10/sup -6/ and 10/sup -10/ mol/s with an estimated uncertainty of 0.8% to 2%. Comparisons of the flowmeters with alternate calibration techniques, and repeated low-range leak and vacuum gauge calibrations, have been used to confirm the estimated uncertainty and random errors of the flowmeter.

Authors:
; ; ;
Publication Date:
Research Org.:
National Bureau of Standards, Center for Basic Standards, Gaithersburg, Maryland 20899
OSTI Identifier:
6876243
Resource Type:
Journal Article
Journal Name:
J. Vac. Sci. Technol., A; (United States)
Additional Journal Information:
Journal Volume: 5:3
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; FLOWMETERS; COMPARATIVE EVALUATIONS; FABRICATION; OPERATION; LEAK DETECTORS; CALIBRATION; VACUUM GAGES; LEAK TESTING; LEAKS; STANDARDS; VACUUM SYSTEMS; MEASURING INSTRUMENTS; METERS; PRESSURE GAGES; TESTING; 420200* - Engineering- Facilities, Equipment, & Techniques

Citation Formats

McCulloh, K E, Tilford, C R, Ehrlich, C D, and Long, F G. Low-range flowmeters for use with vacuum and leak standards. United States: N. p., 1987. Web. doi:10.1116/1.574163.
McCulloh, K E, Tilford, C R, Ehrlich, C D, & Long, F G. Low-range flowmeters for use with vacuum and leak standards. United States. https://doi.org/10.1116/1.574163
McCulloh, K E, Tilford, C R, Ehrlich, C D, and Long, F G. 1987. "Low-range flowmeters for use with vacuum and leak standards". United States. https://doi.org/10.1116/1.574163.
@article{osti_6876243,
title = {Low-range flowmeters for use with vacuum and leak standards},
author = {McCulloh, K E and Tilford, C R and Ehrlich, C D and Long, F G},
abstractNote = {Vacuum pressure standards of the orifice-flow type require known gas flows of 10/sup -6/ mol/s (10/sup -2/ atm cm/sup 3//s at 0 /sup 0/C) and less. Known gas flows can also be used to calibrate ''standard'' leaks by comparing the pressures generated when flows from the leak and the flowmeter are alternately passed through a constant conductance. Two constant-pressure, piston displacement flowmeters developed at the National Bureau of Standards are described that can generate flows between 10/sup -6/ and 10/sup -10/ mol/s with an estimated uncertainty of 0.8% to 2%. Comparisons of the flowmeters with alternate calibration techniques, and repeated low-range leak and vacuum gauge calibrations, have been used to confirm the estimated uncertainty and random errors of the flowmeter.},
doi = {10.1116/1.574163},
url = {https://www.osti.gov/biblio/6876243}, journal = {J. Vac. Sci. Technol., A; (United States)},
number = ,
volume = 5:3,
place = {United States},
year = {Fri May 01 00:00:00 EDT 1987},
month = {Fri May 01 00:00:00 EDT 1987}
}