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Title: Control of microstructure and orientation in solution-deposited BaTiO{sub 3} and SrTiO{sub 3} thin films

Abstract

Columnar and highly oriented (100) BaTiO{sub 3} and SrTiO{sub 3} thin films were prepared by a chelate-type chemical solution deposition (CSD) process by manipulation of film deposition conditions and seeded growth techniques. Randomly oriented columnar films were prepared on platinum-coated Si substrates by a multilayering process in which nucleation of the perovskite phase was restricted to the substrate or underlying layers by control of layer thickness. The columnar films displayed improvements in dielectric constant and dielectric loss compared to the fine-grain equiaxed films that typically result from CSD methods. Highly oriented BaTiO{sub 3} and SrTiO{sub 3} thin films were fabricated on LaAlO{sub 3} by a seeded growth process that appeared to follow a standard two-step growth mechanism that has been previously reported. The film transformation process involved the bulk nucleation of BaTiO{sub 3} throughout the film, followed by the consumption of this matrix by an epitaxial overgrowth process originating at the seed layer. Both BaTiO{sub 3} and PbTiO{sub 3} seed layers were effective in promoting the growth of highly oriented (100) BaTiO{sub 3} films. Based on the various processing factors that can influence thin film microstructure, the decomposition pathway involving the formation of BaCO{sub 3} and TiO{sub 2} appeared tomore » dictate thin film microstructural evolution.« less

Authors:
 [1]; ; ; ; ; ;  [2]
  1. Clemson Univ., SC (United States). Gilbert C. Robinson Dept. of Ceramic and Materials Engineering
  2. Sandia National Labs., Albuquerque, NM (United States)
Publication Date:
Research Org.:
Sandia National Laboratory
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
684422
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Journal Article
Journal Name:
Journal of the American Ceramic Society
Additional Journal Information:
Journal Volume: 82; Journal Issue: 9; Other Information: DN: Paper presented at the 100th Annual Meeting of the American Ceramic Society, Cincinnati, OH, May 4, 1998; PBD: Sep 1999
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DEPOSITION; MICROSTRUCTURE; BARIUM OXIDES; TITANIUM OXIDES; STRONTIUM OXIDES; THIN FILMS; HIGH-TC SUPERCONDUCTORS; PLATINUM; ORIENTATION

Citation Formats

Schwartz, R.W., Clem, P.G., Voigt, J.A., Byhoff, E.R., Van Stry, M., Headley, T.J., and Missert, N.A. Control of microstructure and orientation in solution-deposited BaTiO{sub 3} and SrTiO{sub 3} thin films. United States: N. p., 1999. Web. doi:10.1111/j.1151-2916.1999.tb02091.x.
Schwartz, R.W., Clem, P.G., Voigt, J.A., Byhoff, E.R., Van Stry, M., Headley, T.J., & Missert, N.A. Control of microstructure and orientation in solution-deposited BaTiO{sub 3} and SrTiO{sub 3} thin films. United States. doi:10.1111/j.1151-2916.1999.tb02091.x.
Schwartz, R.W., Clem, P.G., Voigt, J.A., Byhoff, E.R., Van Stry, M., Headley, T.J., and Missert, N.A. Wed . "Control of microstructure and orientation in solution-deposited BaTiO{sub 3} and SrTiO{sub 3} thin films". United States. doi:10.1111/j.1151-2916.1999.tb02091.x.
@article{osti_684422,
title = {Control of microstructure and orientation in solution-deposited BaTiO{sub 3} and SrTiO{sub 3} thin films},
author = {Schwartz, R.W. and Clem, P.G. and Voigt, J.A. and Byhoff, E.R. and Van Stry, M. and Headley, T.J. and Missert, N.A.},
abstractNote = {Columnar and highly oriented (100) BaTiO{sub 3} and SrTiO{sub 3} thin films were prepared by a chelate-type chemical solution deposition (CSD) process by manipulation of film deposition conditions and seeded growth techniques. Randomly oriented columnar films were prepared on platinum-coated Si substrates by a multilayering process in which nucleation of the perovskite phase was restricted to the substrate or underlying layers by control of layer thickness. The columnar films displayed improvements in dielectric constant and dielectric loss compared to the fine-grain equiaxed films that typically result from CSD methods. Highly oriented BaTiO{sub 3} and SrTiO{sub 3} thin films were fabricated on LaAlO{sub 3} by a seeded growth process that appeared to follow a standard two-step growth mechanism that has been previously reported. The film transformation process involved the bulk nucleation of BaTiO{sub 3} throughout the film, followed by the consumption of this matrix by an epitaxial overgrowth process originating at the seed layer. Both BaTiO{sub 3} and PbTiO{sub 3} seed layers were effective in promoting the growth of highly oriented (100) BaTiO{sub 3} films. Based on the various processing factors that can influence thin film microstructure, the decomposition pathway involving the formation of BaCO{sub 3} and TiO{sub 2} appeared to dictate thin film microstructural evolution.},
doi = {10.1111/j.1151-2916.1999.tb02091.x},
journal = {Journal of the American Ceramic Society},
number = 9,
volume = 82,
place = {United States},
year = {1999},
month = {9}
}