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Title: Electrically conducting oxide thin films of (Sr,Ca)RuO{sub 3} and structural compatibility with (Ba,Sr)TiO{sub 3}

Journal Article · · Materials Research Bulletin
;  [1]; ; ;  [2];  [3]
  1. Univ. of Washington, Seatte, WA (United States). Dept. of Materials Science and Engineering
  2. Hanyang Univ., Seoul (Korea, Republic of). Dept. of Inorganic Materials Engineering
  3. Univ. of Washington, Seattle, WA (United States). Dept. of Materials Science and Engineering

Electrically conducting oxide thin films, Ca{sub x}Sr{sub 1{minus}x}RuO{sub 3}, where x varies from 1 to 0, were prepared by radio frequency (RF) magnetron sputtering, and their structural compatibility with (Ba,Sr)TiO{sub 3} thin films was investigated. It was found that both materials crystallize into the perovskite structure, and the lattice parameter for Ca{sub x}Sr{sub 1{minus}x}RuO{sub 3} can be tuned to that of (Ba,Sr)TiO{sub 3} by adjusting the Ca/Sr ratio, so that the compatibility between the two materials at the interface is increased. Structural, chemical, and electrical properties of the thin films and the heterostructures were characterized. Cross-sectional high-resolution electron microscopy (HREM) revealed that the (Ba,Sr)TiO{sub 3} thin film was grown epitaxially on the (Ca,Sr)RuO{sub 3}. The potential utility of Ca{sub x}Sr{sub 1{minus}x}RuO{sub 3} as a bottom electrode for (Ba,Sr)TiO{sub 3} is suggested.

OSTI ID:
684413
Journal Information:
Materials Research Bulletin, Vol. 34, Issue 6; Other Information: PBD: Apr 1999
Country of Publication:
United States
Language:
English