Structural and electrical properties of (Ti[sub 0. 9]Zr[sub 0. 1])Si[sub 2] thin films on Si(111)

Journal Article · Mon Nov 07 00:00:00 EST 1994 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.112692· OSTI ID:6841837

Dao, Y; Edwards, A M; Ying, H; Chen, Y L; Sayers, D E; Nemanich, R J ^[1]

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1. Department of Physics, North Carolina State University, Raleigh, North Carolina 27695-8202 (United States)

Alloy films of Ti and up to 20% Zr were prepared by codeposition onto Si(111) surfaces in ultrahigh vacuum. After [ital in] [ital situ] thermal annealing at temperatures of [similar to]600 [degree]C, the films form the C49 phase and are stable in this phase up to at least 910 [degree]C. In contrast, Ti films on Si(111) initially react to form the C49 phase and transform to the C54 phase at [similar to]700 [degree]C. The surfaces of the (Ti[sub 0.9]Zr[sub 0.1])Si[sub 2] alloy films are studied by atomic force microscopy and are shown to be smoother than the surfaces of TiSi[sub 2] films on Si substrates. In addition the tendency to island formation is also not observed for annealing temperatures less than 910 [degree]C. The sheet resistivity of the (Ti[sub 0.9]Zr[sub 0.1])Si[sub 2] alloy films is found to be [similar to]46 [mu][Omega] cm for annealing temperatures from 600 to 910 [degree]C.

• DOE Contract Number: FG05-89ER45384
• OSTI ID: 6841837
• Journal Information: Applied Physics Letters; (United States), Vol. 65:19; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
TITANIUM SILICIDES
DEPOSITION
ZIRCONIUM SILICIDES
ANNEALING
ELECTRIC CONDUCTIVITY
MORPHOLOGY
PHASE STABILITY
PHASE STUDIES
STABILIZATION
THIN FILMS
ELECTRICAL PROPERTIES
FILMS
HEAT TREATMENTS
PHYSICAL PROPERTIES
SILICIDES
SILICON COMPOUNDS
STABILITY
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies
360204 - Ceramics
Cermets
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