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Title: On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition

Abstract

We have investigated how ion irradiation can selectively promote formation of dense [ital sp][sup 3]-bonded cubic [ital c]BN over the graphite-like [ital sp][sup 2]-bonded phases. Experiments used ion-assisted pulsed laser deposition in which either the ion mass (m[sub ion]) or ion energy (E) was varied in conjunction with ratio of ion flux to depositing atom flux (J/a). For a fixed ion energy and mass, there is a critical J/a above which [ital c]BN formation is initiated, a window of J/a values in which large [ital c]BN percentages are obtained, and a point at which J/a is so large that the resputter and deposition rates balance and there is no net film deposition, in agreement with Kester and Messier. As do Kester and Messier, we find that [ital c]BN formation is controlled by a combination of experimental parameters that scale with the momentum of the ions. However, unlike Kester and Messier, we do not find that [ital c]BN formation scales with the maximum momentum that can be transferred in a single binary collision, as either incorrectly formulated by Targove and Macleod and used by Kester and Messier, or as correctly formulated. Instead we observe that [ital c]BN formation best scales withmore » the total momentum of the incident ions, (m[sub ion]E)[sup 1/2]. We also consider the mechanistic origins of this (m[sub ion]E)[sup 1/2] dependence. Computer simulations of the interaction of ions with BN show that [ital c]BN formation cannot be simply scaled to parameters such as the number of atomic displacements or the number of vacancies produced by the ion irradiation. A critical examination of the literature shows that none of the proposed models satisfactorily accounts for the observed (m[sub ion]E)[sup 1/2] dependence. We present a quantitative model that describes the generation of stress during ion-assisted film growth.« less

Authors:
; ; ; ; ;  [1]; ;  [2]
  1. Sandia National Laboratories, Livermore, California 94550 (United States)
  2. Department of Chemical Engineering and Materials Science, University of California at Davis, Davis, California 95616 (United States)
Publication Date:
OSTI Identifier:
6837038
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Journal Article
Journal Name:
Journal of Materials Research; (United States)
Additional Journal Information:
Journal Volume: 9:11; Journal ID: ISSN 0884-2914
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; BORON NITRIDES; DEPOSITION; COMPUTERIZED SIMULATION; CUBIC LATTICES; FILMS; ION BEAMS; LASER RADIATION; MATHEMATICAL MODELS; PULSED IRRADIATION; SCALING LAWS; STRESSES; ULTRAHIGH VACUUM; BEAMS; BORON COMPOUNDS; CRYSTAL LATTICES; CRYSTAL STRUCTURE; ELECTROMAGNETIC RADIATION; IRRADIATION; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; RADIATIONS; SIMULATION; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication

Citation Formats

Mirkarimi, P B, McCarty, K F, Medlin, D L, Wolfer, W G, Friedmann, T A, Klaus, E J, Cardinale, G F, and Howitt, D G. On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition. United States: N. p., 1994. Web. doi:10.1557/JMR.1994.2925.
Mirkarimi, P B, McCarty, K F, Medlin, D L, Wolfer, W G, Friedmann, T A, Klaus, E J, Cardinale, G F, & Howitt, D G. On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition. United States. https://doi.org/10.1557/JMR.1994.2925
Mirkarimi, P B, McCarty, K F, Medlin, D L, Wolfer, W G, Friedmann, T A, Klaus, E J, Cardinale, G F, and Howitt, D G. 1994. "On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition". United States. https://doi.org/10.1557/JMR.1994.2925.
@article{osti_6837038,
title = {On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition},
author = {Mirkarimi, P B and McCarty, K F and Medlin, D L and Wolfer, W G and Friedmann, T A and Klaus, E J and Cardinale, G F and Howitt, D G},
abstractNote = {We have investigated how ion irradiation can selectively promote formation of dense [ital sp][sup 3]-bonded cubic [ital c]BN over the graphite-like [ital sp][sup 2]-bonded phases. Experiments used ion-assisted pulsed laser deposition in which either the ion mass (m[sub ion]) or ion energy (E) was varied in conjunction with ratio of ion flux to depositing atom flux (J/a). For a fixed ion energy and mass, there is a critical J/a above which [ital c]BN formation is initiated, a window of J/a values in which large [ital c]BN percentages are obtained, and a point at which J/a is so large that the resputter and deposition rates balance and there is no net film deposition, in agreement with Kester and Messier. As do Kester and Messier, we find that [ital c]BN formation is controlled by a combination of experimental parameters that scale with the momentum of the ions. However, unlike Kester and Messier, we do not find that [ital c]BN formation scales with the maximum momentum that can be transferred in a single binary collision, as either incorrectly formulated by Targove and Macleod and used by Kester and Messier, or as correctly formulated. Instead we observe that [ital c]BN formation best scales with the total momentum of the incident ions, (m[sub ion]E)[sup 1/2]. We also consider the mechanistic origins of this (m[sub ion]E)[sup 1/2] dependence. Computer simulations of the interaction of ions with BN show that [ital c]BN formation cannot be simply scaled to parameters such as the number of atomic displacements or the number of vacancies produced by the ion irradiation. A critical examination of the literature shows that none of the proposed models satisfactorily accounts for the observed (m[sub ion]E)[sup 1/2] dependence. We present a quantitative model that describes the generation of stress during ion-assisted film growth.},
doi = {10.1557/JMR.1994.2925},
url = {https://www.osti.gov/biblio/6837038}, journal = {Journal of Materials Research; (United States)},
issn = {0884-2914},
number = ,
volume = 9:11,
place = {United States},
year = {Tue Nov 01 00:00:00 EST 1994},
month = {Tue Nov 01 00:00:00 EST 1994}
}