Mechanical properties testing of diamond and diamond-like films by ultra-low load indentation
- Tennessee Univ., Knoxville, TN (USA)
- Oak Ridge National Lab., TN (USA)
The mechanical properties of diamond-like carbon and diamond films have been studied using an ultra-low load indentation technique. The elastic/plastic properties of the films can be evaluated from the continuous load and displacement data acquired with a mechanical properties microprobe. Values for hardness and elastic modulus are given for both types of films relative to natural diamond and single-crystal sapphire. Determination of hardness and modulus of elasticity in thin films (particularly those with high values such as diamond) requires more information than can be obtained from conventional (e.g., Knoop or Vicker's) microhardness testing. The use of the mechanical properties microprobe to characterize these properties is addressed. 6 refs., 4 figs.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6826612
- Report Number(s):
- CONF-900731-1; ON: DE90014456
- Resource Relation:
- Conference: NATO Advisory Study Institute on diamond and diamond-like films, Castelvecchio Pascoli (Italy), 22 Jul - 2 Aug 1990
- Country of Publication:
- United States
- Language:
- English
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