Co-planar multiple-ring electrostatic particle-beam lenses

Journal Article · Tue Nov 01 00:00:00 EST 1994 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.587457· OSTI ID:6816647

Moran, M J ^[1]

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1. Lawrence Livermore National Laboratory, P. O. Box 808, Livermore, California 94550 (United States)

Electrostatic particle-beam lenses using a concentric co-planar array of independently biased rings can be advantageous for some applications. Traditional electrostatic lenses often consist of axial series of biased rings, apertures, or tubes. The science of lens design has devoted much attention to finding axial arrangements that compensate for the substantial optical aberrations of the individual elements. Thus, as with multielement lenses for light, a multielement charged-particle lens can have optical behavior that is far superior to that of the individual elements. This article discusses the possibility that transverse multiple-concentric-ring lenses can achieve high performance, while also having advantages in terms of compactness and optical versatility.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 6816647
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Vol. 12:6; ISSN 0734-211X
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
ELECTROSTATIC LENSES
DESIGN
BEAM OPTICS
PERFORMANCE
LENSES
430200* - Particle Accelerators- Beam Dynamics
Field Calculations
& Ion Optics