Atomic structure of ion-implantation produced amorphous silicon and amorphous-crystalline interface structure and kinetics
The structure of amorphous silicon determines its physical properties ranging from crystallization kinetics to efficiency of solar cells. One point of particular interest has been the existence of microcrystallites in the amorphous phase. Different crystallization kinetics were obtained for purely amorphous silicon and for amorphous silicon having a trace of crystallinity. The incorporation of dopants into substitutional sites after solid-phase crystallization was also found to be affected by the degree of amorphousness. The purpose of this investigation was two fold: first, to characterize the structure of amorphous silicon, and second to study the structure of amorphous-crystalline interface. The importance of these two factors in the crystallization phenomena is discussed.
- Research Organization:
- Oak Ridge National Lab., TN
- DOE Contract Number:
- W-7405-ENG-26
- OSTI ID:
- 6803532
- Journal Information:
- Proc. - Annu. Meet., Electron Microsc. Soc. Am.; (United States), Vol. 40
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
SILICON
CRYSTAL STRUCTURE
SILICON SOLAR CELLS
MATERIALS
INTERFACES
ION IMPLANTATION
MONOCRYSTALS
QUANTUM EFFICIENCY
CRYSTALS
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELEMENTS
EQUIPMENT
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMIMETALS
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion
360602 - Other Materials- Structure & Phase Studies