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Title: A pyrosol technique to deposit highly transparent, low-resistance SnO{sub 2}:F thin films from dimethyltin dichloride

Abstract

Highly transparent, low-resistance SnO{sub 2}:F films suitable as a substrate material for thin film CdS/CdTe solar cells have been developed on 10 {times} 10 cm glass substrates by an ultrasonic spray pyrolysis (pyrosol) technique using dimethyltin dichloride (DMTDC) as a tin source. DMTDC, NH{sub 4}F, and HF, all dissolved in water, served as the source solution. An ultrasonic vibrator operated at 1.5 MHz produced a fine spray of the source solution. It was transported, using air as a carrier gas, to moving glass plates in a belt furnace maintained at 530 C. A very high growth rate of nearly 100 {angstrom}/s was realized in this process with good homogeneity, high transparency, and low resistivity. Films with a sheet resistance of less than 10 {Omega}/{open_square} have been routinely prepared and their preparation technology has been well established. A proper nozzle design and exhaust system to remove the spent gases determines the technology of obtaining spot and cloud free homogeneous films in the belt furnace. A film of 5000 {angstrom} thickness exhibited the lowest electrical resistivity, of 3.9 {times} 10{sup {minus}4} {Omega} cm, a mobility value of 38 cm{sup 2}/V s, and a donor concentration of 4.16 {times} 10{sup 20} cm{sup {minus}3}.more » Films of 5000--6000 {angstrom} thickness having an average transmittance of nearly 85% in the visible range and a sheet resistance of around 8 {Omega}/{open_square} were used as transparent conducting oxide film substrates to fabricate thin film CdS/CdTe solar cells. A solar energy conversion efficiency of over 14% was achieved.« less

Authors:
; ; ; ;  [1]
  1. Matsushita Battery Industrial Co. Ltd., Moriguchi, Osaka (Japan). Photovoltaic Research and Development Center
Publication Date:
OSTI Identifier:
680027
Resource Type:
Journal Article
Journal Name:
Journal of the Electrochemical Society
Additional Journal Information:
Journal Volume: 146; Journal Issue: 6; Other Information: PBD: Jun 1999
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; 36 MATERIALS SCIENCE; TIN OXIDES; TIN FLUORIDES; SUBSTRATES; CADMIUM SULFIDE SOLAR CELLS; CADMIUM TELLURIDE SOLAR CELLS; FABRICATION; ELECTRICAL PROPERTIES; OPTICAL PROPERTIES; QUANTUM EFFICIENCY

Citation Formats

Omura, K, Veluchamy, P, Tsuji, M, Nishio, T, and Murozono, M. A pyrosol technique to deposit highly transparent, low-resistance SnO{sub 2}:F thin films from dimethyltin dichloride. United States: N. p., 1999. Web. doi:10.1149/1.1391900.
Omura, K, Veluchamy, P, Tsuji, M, Nishio, T, & Murozono, M. A pyrosol technique to deposit highly transparent, low-resistance SnO{sub 2}:F thin films from dimethyltin dichloride. United States. https://doi.org/10.1149/1.1391900
Omura, K, Veluchamy, P, Tsuji, M, Nishio, T, and Murozono, M. 1999. "A pyrosol technique to deposit highly transparent, low-resistance SnO{sub 2}:F thin films from dimethyltin dichloride". United States. https://doi.org/10.1149/1.1391900.
@article{osti_680027,
title = {A pyrosol technique to deposit highly transparent, low-resistance SnO{sub 2}:F thin films from dimethyltin dichloride},
author = {Omura, K and Veluchamy, P and Tsuji, M and Nishio, T and Murozono, M},
abstractNote = {Highly transparent, low-resistance SnO{sub 2}:F films suitable as a substrate material for thin film CdS/CdTe solar cells have been developed on 10 {times} 10 cm glass substrates by an ultrasonic spray pyrolysis (pyrosol) technique using dimethyltin dichloride (DMTDC) as a tin source. DMTDC, NH{sub 4}F, and HF, all dissolved in water, served as the source solution. An ultrasonic vibrator operated at 1.5 MHz produced a fine spray of the source solution. It was transported, using air as a carrier gas, to moving glass plates in a belt furnace maintained at 530 C. A very high growth rate of nearly 100 {angstrom}/s was realized in this process with good homogeneity, high transparency, and low resistivity. Films with a sheet resistance of less than 10 {Omega}/{open_square} have been routinely prepared and their preparation technology has been well established. A proper nozzle design and exhaust system to remove the spent gases determines the technology of obtaining spot and cloud free homogeneous films in the belt furnace. A film of 5000 {angstrom} thickness exhibited the lowest electrical resistivity, of 3.9 {times} 10{sup {minus}4} {Omega} cm, a mobility value of 38 cm{sup 2}/V s, and a donor concentration of 4.16 {times} 10{sup 20} cm{sup {minus}3}. Films of 5000--6000 {angstrom} thickness having an average transmittance of nearly 85% in the visible range and a sheet resistance of around 8 {Omega}/{open_square} were used as transparent conducting oxide film substrates to fabricate thin film CdS/CdTe solar cells. A solar energy conversion efficiency of over 14% was achieved.},
doi = {10.1149/1.1391900},
url = {https://www.osti.gov/biblio/680027}, journal = {Journal of the Electrochemical Society},
number = 6,
volume = 146,
place = {United States},
year = {Tue Jun 01 00:00:00 EDT 1999},
month = {Tue Jun 01 00:00:00 EDT 1999}
}