Numerical simulation and acceleration method for electronegative plasmas
- Sandia National Labs., Albuquerque, NM (United States)
An rf-driven, low-temperature, capacitively-coupled, chemically-reacting plasma is a fiendish combination of physical time scales resulting in mathematical stiffness. Previously the author developed a combination of electron Boltzmann equation, ion fluid equation, and time-cycle average equation descriptions which enabled a reasonable numerical solution for the one-dimensional electropositive plasma. Those solutions are reasonably independent of the numerical approximations. The electronegative plasma (Cl{sub 2} in particular) adds a new measure of difficulty to the acceleration schemes when the plasma charge balance is dominantly between positive and negative heavy ions. Results will be discussed on the Cl{sub 2} discharge.
- OSTI ID:
- 67900
- Report Number(s):
- CONF-9310400-; ISSN 0003-0503; TRN: 95:000870-0063
- Journal Information:
- Bulletin of the American Physical Society, Vol. 38, Issue 13; Conference: 46. annual gaseous electronics conference, Montreal (Canada), 19-22 Oct 1993; Other Information: PBD: Dec 1993
- Country of Publication:
- United States
- Language:
- English
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