PECVD (Plasma Enhanced Chemical Vapor Deposition) diamond thin films for research instrumentation. Final report, 9 January 1987-30 April 1988

Technical Report · Fri Jan 01 00:00:00 EST 1988

OSTI ID:6775858

Peters, M G; Pinneo, J M; Ravi, K V; Plano, L S

Natural diamond exhibits several properties that indicate its utility as a semiconducting material. It is environmentally robust and an excellent thermal conductor, characteristics which would allow it to operate under temperature and radiation conditions that would render useless more commonly used semiconductors such as silicon and GaAs. In addition, it has optical properties that suggest its use as a short-wavelength turnable laser. Several materials issues have prevented the development of diamond as a semiconductor in device, laser, and related applications. Natural diamond is expensive to obtain in useful sizes. The impurity and defect levels can vary dramatically from one sample to the next, making potential product reproducibility difficult to achieve. It is unavailable in thin film form. High-pressure synthetic diamond is also unsuitable for the foregoing applications because of impurities and inability to produce thin films.

• Research Organization: Crystallume, Menlo Park, CA (USA)
• OSTI ID: 6775858
• Report Number(s): AD-A-195443/7/XAB
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
42 ENGINEERING
DIAMONDS
THIN FILMS
SEMICONDUCTOR LASERS
CHEMICAL VAPOR DEPOSITION
HIGH PRESSURE
IMPURITIES
OPTICAL PROPERTIES
PROGRESS REPORT
CARBON
CHEMICAL COATING
DEPOSITION
DOCUMENT TYPES
ELEMENTAL MINERALS
ELEMENTS
FILMS
LASERS
MINERALS
NONMETALS
PHYSICAL PROPERTIES
SEMICONDUCTOR DEVICES
SURFACE COATING
440100* - Radiation Instrumentation
420300 - Engineering- Lasers- (-1989)