An investigation of Li-bearing Cu--Ag, Cu--Ti, and W--Al--Ti thin films deposited by ion-beam sputtering and ion plating
- Corium Industries Inc., Champaign, IL (USA)
The development of erosion resistant thin films for magnetic fusion device applications is investigated using ion-beam sputter deposition and ion plating techniques for fabricating Li-bearing thin films on stainless steel substrates. Ion-beam sputter deposition was performed using bulk targets consisting of Cu--Li--Ag, Cu--Li--Ti, and W--AlLi--Ti for selected substrate temperatures. Ion plating was also used to deposit Cu and Ti/Cu films on stainless steel substrates. The deposited films were then heat-treated in Li atmosphere at various temperatures for producing Li-bearing films. Analyses of Auger electron spectra have revealed that ion-beam sputter deposited Cu--Li--Ti and Cu--Li--Ag films contain approximately 18 at. % Li, being uniform throughout the thin film and almost equal to the bulk Li concentration (22 at. %) of the respective target materials. Subsequent heating of the Cu--Li--Ti films indicates Li segregates to the surface forming a regenerative Li overlayer. In the case of ion-beam sputter deposited W based films, the presence of Li in the films has been detected by the sputter neutral mass spectroscopy. The ion-plated/Li-treated Cu and Cu/Ti thin films have been shown via Auger profiling to contain 12--18 at. % Li and 8--15 at. % Li, respectively. In the case of the Cu--Ti--Li films, Li existed in the metal state when relatively large local concentration of Ti was present, while Li predominantly exists as an oxide in Ti-deficient regions of the film.
- DOE Contract Number:
- AC05-87ER80508; AC02-76ER01198
- OSTI ID:
- 6764695
- Journal Information:
- Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Vol. 8:3, Issue 3; ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
Similar Records
Influence of ion beam activation on the mode of growth of Cu on Si(100)
Surface characterization of Zr/Ti/Nb tri-layered films deposited by magnetron sputtering on Si(111) and stainless steel substrates
Related Subjects
36 MATERIALS SCIENCE
ALUMINIUM
THIN FILMS
COPPER
LITHIUM
SILVER
TITANIUM
TUNGSTEN
AUGER ELECTRON SPECTROSCOPY
FABRICATION
SPUTTERING
STAINLESS STEELS
SUBSTRATES
THERMONUCLEAR REACTORS
ALKALI METALS
ALLOYS
ELECTRON SPECTROSCOPY
ELEMENTS
FILMS
HIGH ALLOY STEELS
IRON ALLOYS
IRON BASE ALLOYS
METALS
SPECTROSCOPY
STEELS
TRANSITION ELEMENTS
700209* - Fusion Power Plant Technology- Component Development & Materials Testing
360105 - Metals & Alloys- Corrosion & Erosion