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Title: Laser-damage-resistant transparent conductive indium tin oxide coatings

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.90727· OSTI ID:6758942

Transparent conductive coatings of In/sub 1.9/Sn/sub 0.1/O/sub 3/ have been made on fused silica which exhibit damage thresholds of 2.2 and 3.1 J/cm/sup 2/ for 0.15- and 1-nsec Nd : glass laser pulses, respectively. The coatings were made by reactive sputtering in an rf diode system. Coating absorption detected spectrophotometrically was less than 1% (approx.300 cm/sup -1/) near 1064 nm for coatings with in-plane resistivities of 0.017 and 0.55 ..cap omega.. cm. An important potential application for such coatings is as the electrode for electro-optic shutters based on the longitudinal Pockels effect which are used in high-energy laser systems.

Research Organization:
Battelle, Pacific Northwest Laboratories, Richland, Washington 99352
OSTI ID:
6758942
Journal Information:
Appl. Phys. Lett.; (United States), Vol. 34:3
Country of Publication:
United States
Language:
English