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Title: Method for preventing micromechanical structures from adhering to another object

Abstract

A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface. 3 figs.

Inventors:
;
Publication Date:
Research Org.:
AT&T Corporation
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
672539
Patent Number(s):
US 5,766,367/A/
Application Number:
PAN: 8-645,976
Assignee:
Sandia Corp., Albuquerque, NM (United States) SNL; SCA: 320303; PA: EDB-98:119150; SN: 98002024904
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 16 Jun 1998
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; MECHANICAL STRUCTURES; ADHESION; MINIATURIZATION; MITIGATION; SURFACE COATING

Citation Formats

Smith, J.H., and Ricco, A.J.. Method for preventing micromechanical structures from adhering to another object. United States: N. p., 1998. Web.
Smith, J.H., & Ricco, A.J.. Method for preventing micromechanical structures from adhering to another object. United States.
Smith, J.H., and Ricco, A.J.. Tue . "Method for preventing micromechanical structures from adhering to another object". United States.
@article{osti_672539,
title = {Method for preventing micromechanical structures from adhering to another object},
author = {Smith, J.H. and Ricco, A.J.},
abstractNote = {A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 16 00:00:00 EDT 1998},
month = {Tue Jun 16 00:00:00 EDT 1998}
}