Diagnostics of a glow discharge used to produce amorphous silicon films. Technical progress report, August 15, 1980-November 14, 1980

Technical Report · Tue Jan 01 00:00:00 EST 1980

DOI:https://doi.org/10.2172/6660789· OSTI ID:6660789

Gallagher, A.; Scott, J.

Construction of the basic apparatus has been completed during this period, and many apparatus checks have been completed. Almost complete SiH/sub 4/ dissociation has been obtained in approx. 950 C ovens between the turbo and rough pumps, so that reliable, long-term operation is achieved. A base vacuum of approx. 10/sup -7/ Torr is achieved in the discharge chamber in a few hours, and approx. 10/sup -8/ overnight, so that gas-phase impurity levels as low as 10/sup -7/ are ready achievable. The SiH/sub 4/ inlet lines are entirely bakeable stainless steel and permanently closed to air, to maintain the tank purity of SiH/sub 4/. A distillation procedure to further clean the tank SiH/sub 4/ is under study. Thus we should be able to study the effects of very small, controlled levels of impurities. The discharge configurations are shown, and the ratios of Si/sub x/H/sub n//sup +/ fluxes for three types of discharges in pure SiH/sub 4/ are given. (WHK)

• Research Organization: Univ. of Colorado, Boulder, CO (United States)
• DOE Contract Number: AC02-77CH00178
• OSTI ID: 6660789
• Report Number(s): SERI/PR-9053-1-T2
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
SILICON
AMORPHOUS STATE
DEPOSITION
GLOW DISCHARGES
IMPURITIES
SILANES
SILICON SOLAR CELLS
DIRECT ENERGY CONVERTERS
ELECTRIC DISCHARGES
ELEMENTS
EQUIPMENT
HYDRIDES
HYDROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMIMETALS
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture