Process of fabricating a Schottky barrier photovoltaic detector

Patent · Tue Oct 26 00:00:00 EDT 1982

OSTI ID:6650009

Harnagel, G L; Harrison, J M; Laga, G T; Twaddell, V A

A platinum-cadmium sulfide Schottky barrier photovoltaic detector is disclosed which is capable of sensing near ultraviolet and short wavelength visible radiation with extremely small response to wavelengths longer than about 5200 angstroms. The detector is fabricated with both the ohmic and barrier contacts located on the same side of the cadmium sulfide substrate to facilitate wire attachment by high-speed bonding techniques. A titanium-gold-titanium infrared shield structure is deposited directly on the substrate and is utilized to provide a connection between the ohmic contact and the substrate. An insulating layer of silicon dioxide covers the shield structure. A thin layer of platinum is deposited directly on the substrate in a small central optically active area surrounded by the insulated shield structure. A metal boundary layer overlies the periphery of the platinum layer and prevents the barrier contact metalization from affecting the properties of the Schottky barrier. Both the ohmic and barrier contacts may be formed of a titanium adhesion layer and a layer of gold. The gold portions of these contacts touch the shield structure and the boundary layer through separate windows etched in the silicon dioxide insulating layer.

• Assignee: General Dynamics Corp
• Patent Number(s): US 4355456
• OSTI ID: 6650009
• Resource Relation: Patent File Date: Filed date 8 Jul 1981; Other Information: PAT-APPL-281258
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
14 SOLAR ENERGY
RADIATION DETECTORS
FABRICATION
SCHOTTKY BARRIER DIODES
ADHESION
CADMIUM SULFIDES
DEPOSITION
GOLD
LAYERS
OPTICAL SYSTEMS
PHOTOVOLTAIC EFFECT
PLATINUM
SILICON OXIDES
SOLID STATE PHYSICS
CADMIUM COMPOUNDS
CHALCOGENIDES
ELEMENTS
INORGANIC PHOSPHORS
MEASURING INSTRUMENTS
METALS
OXIDES
OXYGEN COMPOUNDS
PHOSPHORS
PHOTOELECTROMAGNETIC EFFECTS
PHYSICS
PLATINUM METALS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SILICON COMPOUNDS
SULFIDES
SULFUR COMPOUNDS
TRANSITION ELEMENTS
440100* - Radiation Instrumentation
140501 - Solar Energy Conversion- Photovoltaic Conversion