The effect of surface roughness on reflection high-energy electron diffraction rocking curves and impact on reflection high-energy electron diffraction intensity oscillations

Journal Article · Sun Jul 01 00:00:00 EDT 1990 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.576535· OSTI ID:6639768

Fan, W C; Ignatiev, A ^[1]

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1. University of Houston, Houston, Texas 77204 (USA). Department of Physics University of Houston, Houston, Texas 77204 (USA). Space Vacuum Epitaxy Center

Reflection high-energy electron diffraction (RHEED) rocking curves have been studied for the Si(111)-((3){sup 1/2}{times}(3){sup 1/2}) {ital R}30{degree}--Ag structure as a function of varying degrees of surface roughness as generated by Ar{sup +} ion bombardment. Under increased surface roughness, most peaks in the rocking curves showed a characteristic change represented by splitting, shifting, and variation in intensity. This characteristic change in the rocking curves is identified as a result of surface step generation accompanied by modulation of the surface potential barrier. This surface roughness effect well explains the behavior of RHEED intensity oscillations during epitaxial growth and identifies the origin of phase differences of different beams.

• OSTI ID: 6639768
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Vol. 8:4; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ELECTRON DIFFRACTION
SILICON
MOLECULAR BEAM EPITAXY
ARGON IONS
ION BEAMS
MORPHOLOGY
ROUGHNESS
SILVER
SURFACE POTENTIAL
BEAMS
CHARGED PARTICLES
COHERENT SCATTERING
DIFFRACTION
ELEMENTS
EPITAXY
IONS
METALS
POTENTIALS
SCATTERING
SEMIMETALS
SURFACE PROPERTIES
TRANSITION ELEMENTS
656003* - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)