Method of making improved tunnel barriers for superconducting Josephson junction devices

Patent · Tue Mar 20 00:00:00 EST 1984

OSTI ID:6633573

Flannery, W E; Josephs, R M; Stein, B F; Wang, Tc; Young, P L

During the manufacture of Josephson superconducting devices, it is necessary to provide on a substrate a base electrode, a counter electrode and a small tunnel barrier area therebetween. A novel method of making all three of these active elements in the same vacuum chamber without having to remove the substrate from the vacuum chamber is provided so that the tunnel barrier area is accurately made to a predetermined size and without the danger of contamination. The novel structure is made as a substantially planarized laminate in the vacuum chamber and the tunnel barrier area is defined in a supplemental step.

• Assignee: Sperry Corporation
• Patent Number(s): US 4437227
• OSTI ID: 6633573
• Resource Relation: Patent File Date: Filed date 28 Oct 1982; Other Information: PAT-APPL-437386
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
JOSEPHSON JUNCTIONS
ELECTRODES
FABRICATION
TUNNEL DIODES
LEAD
LEAD ALLOYS
NIOBIUM
NIOBIUM ALLOYS
OPTIMIZATION
SUBSTRATES
VACUUM COATING
ALLOYS
DEPOSITION
ELEMENTS
JUNCTIONS
METALS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SUPERCONDUCTING JUNCTIONS
SURFACE COATING
TRANSITION ELEMENTS
420201* - Engineering- Cryogenic Equipment & Devices