MEMS reliability: The challenge and the promise
MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad new array of cost effective solutions only if they prove to be sufficiently reliable. A valid reliability assessment of MEMS has three prerequisites: (1) statistical significance; (2) a technique for accelerating fundamental failure mechanisms, and (3) valid physical models to allow prediction of failures during actual use. These already exist for the microelectronics portion of such integrated systems. The challenge lies in the less well understood micromachine portions and its synergistic effects with microelectronics. This paper presents a methodology addressing these prerequisites and a description of the underlying physics of reliability for micromachines.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 658405
- Report Number(s):
- SAND-98-0630C; CONF-980558-; ON: DE98005641; BR: DP0102022; TRN: AHC2DT06%%289
- Resource Relation:
- Conference: 4. international `the reliability challenge`, Dublin (Ireland), 19 May 1998; Other Information: PBD: May 1998
- Country of Publication:
- United States
- Language:
- English
Similar Records
Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS).
Fundamental mechanisms of micromachine reliability