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Title: Reactive sputtering of molybdenum-oxide gradient-index filters

Abstract

Molybdenum-oxide gradient-index films are produced by reactive sputter deposition. A molybdenum metal target is sputtered continuously with an argon-oxygen gas mixture. For each target power used, a reproducible oxide composition and corresponding refractive index result. Repetitive variation of applied target power is used to produce a structure composed of discrete layers of preselect stoichiometry. The systematic control of a single process parameter, target power, simplifies the fabrication of molybdenum-oxide rugate filters. 7 refs., 6 figs.

Authors:
; ;
Publication Date:
Research Org.:
Lawrence Livermore National Lab., CA (USA)
Sponsoring Org.:
DOE/DP
OSTI Identifier:
6535616
Report Number(s):
UCRL-JC-103668; CONF-901035-4
ON: DE91000939
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Conference: 37. national American Vacuum Society symposium, Toronto (Canada), 8-12 Oct 1990
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; MOLYBDENUM; SPUTTERING; MOLYBDENUM OXIDES; COATINGS; ARGON; AUGER ELECTRON SPECTROSCOPY; DEPOSITION; OPTICAL FILTERS; OXYGEN; REFRACTIVITY; TRANSMISSION ELECTRON MICROSCOPY; CHALCOGENIDES; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; ELEMENTS; FILTERS; FLUIDS; GASES; METALS; MICROSCOPY; MOLYBDENUM COMPOUNDS; NONMETALS; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RARE GASES; REFRACTORY METAL COMPOUNDS; SPECTROSCOPY; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication

Citation Formats

Jankowski, A F, Schrawyer, L R, and Perry, P L. Reactive sputtering of molybdenum-oxide gradient-index filters. United States: N. p., 1990. Web.
Jankowski, A F, Schrawyer, L R, & Perry, P L. Reactive sputtering of molybdenum-oxide gradient-index filters. United States.
Jankowski, A F, Schrawyer, L R, and Perry, P L. Wed . "Reactive sputtering of molybdenum-oxide gradient-index filters". United States. https://www.osti.gov/servlets/purl/6535616.
@article{osti_6535616,
title = {Reactive sputtering of molybdenum-oxide gradient-index filters},
author = {Jankowski, A F and Schrawyer, L R and Perry, P L},
abstractNote = {Molybdenum-oxide gradient-index films are produced by reactive sputter deposition. A molybdenum metal target is sputtered continuously with an argon-oxygen gas mixture. For each target power used, a reproducible oxide composition and corresponding refractive index result. Repetitive variation of applied target power is used to produce a structure composed of discrete layers of preselect stoichiometry. The systematic control of a single process parameter, target power, simplifies the fabrication of molybdenum-oxide rugate filters. 7 refs., 6 figs.},
doi = {},
url = {https://www.osti.gov/biblio/6535616}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {8}
}

Conference:
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