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Title: Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness

Abstract

Single-crystal TiN/VN strained-layer superlattices (SLS's) with layer thicknesses l/sub TiN/ = l/sub VN/ = lambda/2 (where lambda is the period of the superlattice) ranging from 0.75 to 16 nm have been grown on MgO(100 ) substrates by reactive magnetron sputtering. Cross-sectional transmission electron microscopy (TEM) and x-ray diffraction examinations showed that the films were single crystals exhibiting coherent interfaces and several orders of superlattice reflections. There was no evidence in either plan-view or cross-sectional TEM analyses of misfit interfacial dislocation arrays. The primary defects observed were dislocation loops with a diameter of 8--10 nm extending through several layers and small defects with a diameter of 1--2 nm that were confined within single layers. Microindentation hardness values H, measured as a function of lambda in films with a total thickness of 2.5 ..mu..m, increased from 2035 +- 280 kg mm/sup -2/ for Ti/sub 0.5/V/sub 0.5/N alloys (i.e., lambda = 0) to reach a maximum of 5560 +- 1000 kg mm/sup -2/ at lambda = 5.2 nm and then decreased rapidly to 3950 +- 550 kg mm/sup -2/ at lambda = 7.5 nm. Further increases in lambda resulted in a slower decrease in H to 3640 +- 550 kg mm/sup -2/ atmore » lambda = 32 nm. The large error bars in the H values for the SLS samples were due to the difficulty in measuring such extremely high hardnesses in thin films.« less

Authors:
; ; ; ; ;
Publication Date:
Research Org.:
Department of Physics, Linkoeping University, S-581 83 Linkoeping, Sweden
OSTI Identifier:
6512048
Resource Type:
Journal Article
Journal Name:
J. Appl. Phys.; (United States)
Additional Journal Information:
Journal Volume: 62:2
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; MOLYBDENUM OXIDES; VAPOR DEPOSITED COATINGS; SUPERLATTICES; FABRICATION; TITANIUM NITRIDES; DISLOCATIONS; HARDNESS; SPUTTERING; VANADIUM NITRIDES; TRANSMISSION ELECTRON MICROSCOPY; CHALCOGENIDES; COATINGS; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; ELECTRON MICROSCOPY; LINE DEFECTS; MECHANICAL PROPERTIES; MICROSCOPY; MOLYBDENUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; REFRACTORY METAL COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; VANADIUM COMPOUNDS; 360201* - Ceramics, Cermets, & Refractories- Preparation & Fabrication; 360204 - Ceramics, Cermets, & Refractories- Physical Properties

Citation Formats

Helmersson, U, Todorova, S, Barnett, S A, Sundgren, J, Markert, L C, and Greene, J E. Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness. United States: N. p., 1987. Web. doi:10.1063/1.339770.
Helmersson, U, Todorova, S, Barnett, S A, Sundgren, J, Markert, L C, & Greene, J E. Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness. United States. doi:10.1063/1.339770.
Helmersson, U, Todorova, S, Barnett, S A, Sundgren, J, Markert, L C, and Greene, J E. Wed . "Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness". United States. doi:10.1063/1.339770.
@article{osti_6512048,
title = {Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness},
author = {Helmersson, U and Todorova, S and Barnett, S A and Sundgren, J and Markert, L C and Greene, J E},
abstractNote = {Single-crystal TiN/VN strained-layer superlattices (SLS's) with layer thicknesses l/sub TiN/ = l/sub VN/ = lambda/2 (where lambda is the period of the superlattice) ranging from 0.75 to 16 nm have been grown on MgO(100 ) substrates by reactive magnetron sputtering. Cross-sectional transmission electron microscopy (TEM) and x-ray diffraction examinations showed that the films were single crystals exhibiting coherent interfaces and several orders of superlattice reflections. There was no evidence in either plan-view or cross-sectional TEM analyses of misfit interfacial dislocation arrays. The primary defects observed were dislocation loops with a diameter of 8--10 nm extending through several layers and small defects with a diameter of 1--2 nm that were confined within single layers. Microindentation hardness values H, measured as a function of lambda in films with a total thickness of 2.5 ..mu..m, increased from 2035 +- 280 kg mm/sup -2/ for Ti/sub 0.5/V/sub 0.5/N alloys (i.e., lambda = 0) to reach a maximum of 5560 +- 1000 kg mm/sup -2/ at lambda = 5.2 nm and then decreased rapidly to 3950 +- 550 kg mm/sup -2/ at lambda = 7.5 nm. Further increases in lambda resulted in a slower decrease in H to 3640 +- 550 kg mm/sup -2/ at lambda = 32 nm. The large error bars in the H values for the SLS samples were due to the difficulty in measuring such extremely high hardnesses in thin films.},
doi = {10.1063/1.339770},
journal = {J. Appl. Phys.; (United States)},
number = ,
volume = 62:2,
place = {United States},
year = {1987},
month = {7}
}