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Title: Hydrogen depth profiling using elastic recoil detection

Conference ·
OSTI ID:6488071

The elastic recoil detection (ERD) analysis technique for H profiling in the near surface regions of solids is described. ERD is shown to have the capability of detecting H and its isotopes down to concentrations of approx. 0.01 at. % with a depth resolution of a few hundred angstroms. Is is demonstrated that 2.4-MeV He ions can be used successfully to profile /sup 1/H and /sup 2/D using this technique. 12 figures.

Research Organization:
Sandia Labs., Albuquerque, NM (USA)
DOE Contract Number:
EY-76-C-04-0789
OSTI ID:
6488071
Report Number(s):
SAND-79-0210C; CONF-790127-2; TRN: 79-006998
Resource Relation:
Conference: Workshop on analysis of hydrogen in solids, Albuquerque, NM, USA, 23 Jan 1979
Country of Publication:
United States
Language:
English