Investigation of near-surface chemical, physical and mechanical properties of silicon carbide crystals and fibers modified by ion implantation. Final report

Technical Report · Wed Aug 17 00:00:00 EDT 1988

OSTI ID:6478851

Spitznagel, J A; Wood, S

Modification of chemical, physical and mechanical properties of ceramic/semiconductor surfaces by ion implantation provides an opportunity to define and obtain desirable properties for a variety of applications. These include: interfaces in composite materials, electrical properties of devices and contacts, and specialized surfaces for optical waveguides, wear and corrosion resistance, etc. In this study, single crystals (6H), and whiskers of high-purity silicon carbide were implanted with a variety of n- and p-type dopants (B, N, Al, P), an isovalent dopant (Ti), inert species (Ne) and hydrogen. Isochronal anneals at temperatures up to 1173K permitted systematic evaluation of thermal effects in the implanted region. Implants fluences were normalized to permit comparisons on the basis of equal concentrations of displaced Si atoms for each ion. Microstructural, mechanical and chemical effects were studied by a series of RBS/channeling, TEM, SEM, microhardness, microtensile, AES, SIMS, and wetting (sputtered and molten metal) measurements. Recovery of crystalline structure during annealing is shown to be relatively independent of the implant species but depends upon the number of atomic displacements in the Si sublattice. Near-surface mechanical and chemical effects, however, are very dependent on the chemical/electrical nature of the implanted ions. Applications to ceramic/metal interfaces in metal matrix composites are discussed.

• Research Organization: Westinghouse Electric Corp., Pittsburgh, PA (USA). Research and Development Center
• OSTI ID: 6478851
• Report Number(s): AD-A-200613/8/XAB
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
COMPOSITE MATERIALS
INTERFACES
SILICON CARBIDES
ION IMPLANTATION
ANNEALING
ATOMS
BORON IONS
CORROSION RESISTANCE
CRYSTALS
ELECTRICAL PROPERTIES
FIBERS
HYDROGEN IONS
LIQUID METALS
MECHANICAL PROPERTIES
MICROHARDNESS
NEON IONS
NITROGEN IONS
PHOSPHORUS IONS
PHYSICAL PROPERTIES
PROGRESS REPORT
SILICON
SURFACES
TITANIUM IONS
CARBIDES
CARBON COMPOUNDS
CHARGED PARTICLES
DOCUMENT TYPES
ELEMENTS
FLUIDS
HARDNESS
HEAT TREATMENTS
IONS
LIQUIDS
MATERIALS
METALS
SEMIMETALS
SILICON COMPOUNDS
360605* - Materials- Radiation Effects