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Title: Mechanism of enhanced plasma transport of vacuum arc plasma through curved magnetic ducts

Journal Article · · Journal of Vacuum Science and Technology, A
DOI:https://doi.org/10.1116/1.582008· OSTI ID:6466031
; ; ; ;  [1];  [2];  [3]
  1. Department of Physics and Materials Science, City University of Hong Kong, Kowloon (Hong Kong)
  2. Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)
  3. Institute of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, Beijing 100875 (China)

The mechanism of the enhanced transport efficiency in a vacuum arc plasma source equipped with a curved magnetic filter is investigated. The relationship between the transported ion current and the cathodic arc current is determined, and our results suggest that the outer and inner walls of the duct interact with the plasma independently. The plasma flux is composed of two components: a diffusion flux in the transverse direction due to particle collisions, and a drift flux due to the ion inertia. The inner wall of the magnetic duct sees only the diffusion flux while the outer wall receives both fluxes. Thus, applying a positive potential to the outer duct wall reflects the ions and increases the output current. Our experimental data also show that biasing both sides of the duct is more effective than biasing the outer wall alone. [copyright] [ital 1999 American Vacuum Society.]

OSTI ID:
6466031
Journal Information:
Journal of Vacuum Science and Technology, A, Vol. 17:5; ISSN 0734-2101
Country of Publication:
United States
Language:
English

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