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Title: Germanium content dependence of radiation damage in strained Si[sub 1[minus]x]Ge[sub x] epitaxial devices

Conference · · IEEE Transactions on Nuclear Science (Institute of Electrical and Electronics Engineers); (United States)
OSTI ID:6450302
 [1]; ; ;  [2];  [3];  [4];  [5]
  1. Kumamoto National College of Technology (Japan)
  2. IMEC, Leuven (Belgium)
  3. Rikkyo Univ., Kanagawa (Japan). Inst. for Atomic Energy
  4. Japan Atomic Energy Research Inst., Gunma (Japan). Takasaki Radiation Chemistry Research Establishment
  5. RUG, Gent (Belgium)

The irradiation damage in n[sup +]-Si/p[sup +]-Si[sub 1[minus]x]Ge[sub x] epitaxial diodes and n[sup +]-Si/p[sup +]-Si[sub 1[minus]x]Ge[sub x]/n-Si epitaxial heterojunction bipolar transistors (HBTs) by fast neutrons and MeV electrons is studied as a function of fluence and germanium content for the first time. The degradation of the electrical performance of both diodes and HBTs by irradiation increases with increasing fluence, while it decreases with increasing germanium content. The damage coefficient of reverse current for x= 0.12 and 0.16 diodes irradiated by neutrons is calculated to be 6.2 [times] 10[sup [minus]21] and 5.5 [times] 10[sup [minus]21] n[sup [minus]1]Acm[sup 2], respectively. That of h[sub FE] for electron-irradiated x= 0.08, 0.12 and 0.16 HBTs is 7.6 [times] 10[sup [minus]16], 2.7 [times] 10[sup [minus]16] and 1.6 [times] 10[sup [minus]16] e[sup [minus]1]cm[sup 2], respectively.

OSTI ID:
6450302
Report Number(s):
CONF-940726-; CODEN: IETNAE
Journal Information:
IEEE Transactions on Nuclear Science (Institute of Electrical and Electronics Engineers); (United States), Vol. 41:6Pt1; Conference: 31. annual international nuclear and space radiation effects conference, Tucson, AZ (United States), 18-22 Jul 1994; ISSN 0018-9499
Country of Publication:
United States
Language:
English