Formation of thin Cu/sub 2/S (chalcocite) films using reactive sputtering techniques

Journal Article · Thu Mar 01 00:00:00 EST 1979 · J. Vac. Sci. Technol.; (United States)

DOI:https://doi.org/10.1116/1.569910· OSTI ID:6411111

Armantrout, G A; Miller, D E; Vindelov, K E; Brown, T G

Thin Cu/sub 2/S (chalcocite) films, which are of interest for solar cell fabrication, have been prepared using reactive sputtering techniques. The copper--sulfur system, which is multiphasic an polymorphic, is difficult to form in the orthorhombic chalcocite phase. This phase can be achieved by careful control of substrate temperature and the partial pressure of H/sub 2/S in the sputtering atmosphere. Sulfur-rich atmospheres produce the sulfur-rich Cu/sub x/S phases which are unsuitable for solar cell fabrication, whereas sulfur-lean atmospheres result in precipitated copper cones on the surface. Epitaxial chalcocite films have been formed on single-crystal CdS substrates. Charge transport studies in polycrystalline Cu/sub x/S films formed on polycrystalline CdS indicate minority carrier diffusion lengths of 100 nm which are adequate for solar cell operation. The sputtering parameters affecting film formation (H/sub 2/S concentration, substrate temperature and bias, and substrate material) have been studied and are discussed.

• Research Organization: Lawrence Livermore Laboratory, Livermore, California 94550
• OSTI ID: 6411111
• Journal Information: J. Vac. Sci. Technol.; (United States), Vol. 16:2
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
CADMIUM SULFIDE SOLAR CELLS
SURFACE COATING
COPPER SULFIDES
CATHODE SPUTTERING
EPITAXY
CHARGE CARRIERS
DIFFUSION LENGTH
ELECTRIC CONDUCTIVITY
FILMS
HIGH TEMPERATURE
HYDROGEN SULFIDES
INDIUM
MEDIUM TEMPERATURE
OPTICAL PROPERTIES
PHASE STUDIES
PIRANI GAGES
X-RAY DIFFRACTION
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
DEPOSITION
DIFFRACTION
DIRECT ENERGY CONVERTERS
ELECTRICAL PROPERTIES
ELEMENTS
HOT-WIRE GAGES
HYDROGEN COMPOUNDS
MEASURING INSTRUMENTS
METALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PRESSURE GAGES
SCATTERING
SOLAR CELLS
SPUTTERING
SULFIDES
SULFUR COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
VACUUM GAGES
140501* - Solar Energy Conversion- Photovoltaic Conversion