Generation of intense excimer radiation from high-pressure hollow cathode discharges
- Electrical and Computer Engineering Department, Physical Electronics Research Institute, Old Dominion University, Norfolk, Virginia 23529 (United States)
By reducing the diameter of the cathode opening in a hollow cathode discharge geometry to values on the order of 100 {mu}m, we were able to operate these discharges in noble gases in a direct current mode up to atmospheric pressure. High-pressure discharges in xenon were found to be strong sources of excimer radiation. Highest intensities at a wavelength of 172 nm were obtained at a pressure of 400 Torr. At this pressure, the vacuum ultraviolet (VUV) radiant power of a single discharge operating at a forward voltage of 220 V and currents exceeding 2 mA reaches values between 6{percent} and 9{percent} of the input electrical power. The possibility to form arrays of these discharges allows the generation of flat panel VUV lamps with radiant emittances exceeding 50 W/cm{sup 2}. {copyright} {ital 1998 American Institute of Physics.}
- OSTI ID:
- 639816
- Journal Information:
- Applied Physics Letters, Vol. 73, Issue 7; Other Information: PBD: Aug 1998
- Country of Publication:
- United States
- Language:
- English
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