Effect of various gas mixtures on plasma cleaned ceramics. Final report. [Electronic components]
Activated gas plasma cleaning efficiencies of various gas mixtures were studied for the preparation of ceramic parts. Differences in the ease of removal of organic residue are shown by Auger analyses for the various gases. A reduction in plasma process time is shown to be possible, and gases are compared with oxygen on the basis of cleaning efficiency. The plasma cleaning processes and changes suggested by the work are discussed.
- Research Organization:
- Bendix Corp., Kansas City, MO (United States)
- DOE Contract Number:
- EY-76-C-04-0613
- OSTI ID:
- 6375508
- Report Number(s):
- BDX-613-2107(Rev.); TRN: 79-010742
- Country of Publication:
- United States
- Language:
- English
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