Use of sol-gels in the application of ceramic oxide thin films

Thesis/Dissertation · Thu Jan 01 00:00:00 EST 1987

OSTI ID:6366098

Paulson, B A

Metal oxide sol-gels were produced through a controlled hydrolysis-condensation reaction of the metal alkoxide in alcohol using nitric acid as a catalyst. In obtaining sols of niobia, tantala, and titania, increasing either the water content or the system concentration increased the rate of gelation. However, while a sufficient amount of nitric acid was required to promote the condensation of the metal oxide and inhibit the precipitation, increasing the amount of nitric acid beyond that point slowed the gelation rate. A sufficient excess of water also lead to precipitation. These systematic parameter investigations were used to obtain sols of bismuth oxide, germania, yttria, and zirconia. The single component sols were characterized and used to make thin films on silicon wafers. The single-component sols were used to make binary oxide sols - barium titanate, lithium niobate, and lithium tantalate. By altering the stoichiometric ratios of the constituent cations, different compounds were produced for dielectric characterization with an AC bridge circuit.

• Research Organization: Iowa State Univ. of Science and Technology, Ames (USA)
• OSTI ID: 6366098
• Resource Relation: Other Information: Thesis (Ph. D.)
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
42 ENGINEERING
BISMUTH OXIDES
SOLS
GERMANIUM OXIDES
NIOBIUM OXIDES
THIN FILMS
TANTALUM OXIDES
TITANIUM OXIDES
YTTRIUM OXIDES
ZIRCONIUM OXIDES
GELATION
PRECIPITATION
SILICON
SUBSTRATES
BISMUTH COMPOUNDS
CHALCOGENIDES
COLLOIDS
DISPERSIONS
ELEMENTS
FILMS
GERMANIUM COMPOUNDS
NIOBIUM COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SEPARATION PROCESSES
TANTALUM COMPOUNDS
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS
400102* - Chemical & Spectral Procedures
360204 - Ceramics
Cermets
& Refractories- Physical Properties
420800 - Engineering- Electronic Circuits & Devices- (-1989)