High power linear pulsed beam annealer

Patent · Tue Feb 01 00:00:00 EST 1983

OSTI ID:6336868

Sadana, D K; Strathman, M D; True, R B

A high power pulsed electron beam is produced in a system comprised of an electron gun having a heated cathode, control grid, focus ring, and a curved drift tube. The drift tube is maintained at a high positive voltage with respect to the cathode to accelerate electrons passing through the focus ring and to thereby eliminate space charge. A coil surrounding the curved drift tube provides a magnetic field which maintains the electron beam focused about the axis of the tube and imparts motion on electrons in a spiral path for shallow penetration of the electrons into a target. The curvature of the tube is selected so there is no line of sight between the cathode and a target holder positioned within a second drift tube spaced coaxially from the curved tube. The second tube and the target holder are maintained at a reference voltage that decelerates the electrons. A second coil surrounding the second drift tube maintains the electron beam focused about the axis of the second drift tube and compresses the electron beam to the area of the target. The target holder can be adjusted to position the target where the cross section of the beam matches the area of the target.

• Assignee: Dept. of Energy
• Patent Number(s): US 4371774
• Application Number: TRN: 83-009082
• OSTI ID: 6336868
• Resource Relation: Patent File Date: Filed date 26 Nov 1980; Other Information: PAT-APPL-210488
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
36 MATERIALS SCIENCE
ANNEALING
ELECTRON BEAMS
PRODUCTION
ELECTRON GUNS
CATHODES
BEAM PULSERS
DEPTH
DRIFT TUBES
LINEAR ACCELERATORS
MAGNETIC FIELDS
SEMICONDUCTOR DEVICES
ACCELERATORS
BEAMS
DIMENSIONS
ELECTRODES
HEAT TREATMENTS
LEPTON BEAMS
PARTICLE BEAMS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions
360602 - Other Materials- Structure & Phase Studies