skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Multipurpose high vacuum laser ablation/thin film deposition system

Abstract

An instrumental system is described that combines an apparatus for pulsed laser deposition (PLD) with a vacuum [open quotes]suitcase[close quotes] for transport of air-sensitive compounds. Laser ablation, plume diagnostics, and thin-film deposition are readily accomplished through a flexible design. The PLD apparatus consists of two cubes coupled via a bellows assembly and whose distance is easily changed pneumatically. For both the PLD apparatus and the vacuum suitcase, compact-design considerations have been implemented. Consequently, the footprint of the PLD apparatus is relatively small, and the vacuum suitcase can be transported easily between sites. [copyright] [ital 1999 American Institute of Physics.]

Authors:
; ; ;  [1]
  1. (Department of Chemistry, Tulane University, New Orleans, Louisiana 70118 (United States))
Publication Date:
OSTI Identifier:
6332901
Alternate Identifier(s):
OSTI ID: 6332901
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 70:9; Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ABLATION; DESIGN; HIGH VACUUM; MATERIALS HANDLING; MATERIALS HANDLING EQUIPMENT; OPTIMIZATION; PHYSICAL VAPOR DEPOSITION; SAMPLE HOLDERS; THIN FILMS; VACUUM SYSTEMS; DEPOSITION; EQUIPMENT; FILMS; SURFACE COATING 360601* -- Other Materials-- Preparation & Manufacture

Citation Formats

Gomlak, G., Kelly, M.C., Panayotov, V.G., and Koplitz, B. Multipurpose high vacuum laser ablation/thin film deposition system. United States: N. p., 1999. Web. doi:10.1063/1.1149980.
Gomlak, G., Kelly, M.C., Panayotov, V.G., & Koplitz, B. Multipurpose high vacuum laser ablation/thin film deposition system. United States. doi:10.1063/1.1149980.
Gomlak, G., Kelly, M.C., Panayotov, V.G., and Koplitz, B. Wed . "Multipurpose high vacuum laser ablation/thin film deposition system". United States. doi:10.1063/1.1149980.
@article{osti_6332901,
title = {Multipurpose high vacuum laser ablation/thin film deposition system},
author = {Gomlak, G. and Kelly, M.C. and Panayotov, V.G. and Koplitz, B.},
abstractNote = {An instrumental system is described that combines an apparatus for pulsed laser deposition (PLD) with a vacuum [open quotes]suitcase[close quotes] for transport of air-sensitive compounds. Laser ablation, plume diagnostics, and thin-film deposition are readily accomplished through a flexible design. The PLD apparatus consists of two cubes coupled via a bellows assembly and whose distance is easily changed pneumatically. For both the PLD apparatus and the vacuum suitcase, compact-design considerations have been implemented. Consequently, the footprint of the PLD apparatus is relatively small, and the vacuum suitcase can be transported easily between sites. [copyright] [ital 1999 American Institute of Physics.]},
doi = {10.1063/1.1149980},
journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = ,
volume = 70:9,
place = {United States},
year = {1999},
month = {9}
}