Analytical investigation of plasma and electrode potentials in a diode-type r-f (radiofrequency) discharge

Technical Report · Wed Oct 01 00:00:00 EDT 1986

OSTI ID:6317412

Suzuki, K; Ninomiya, K; Nishimatsu, S; Thoman, J W; Steinfeld, J I

Electrical potentials of a plasma and both electrodes in a diode-type r-f discharge are analytically obtained under the assumptions of quasi-static electric fields in an ion sheath, low gas pressure, charge neutrality of the plasma, and eta <<1 (eas is the ratio of electrode areas). The dependence of dV/sub p/ D/dU/sub p/ (V/sub p/ D and U/sub p/ are the d-c part of the plasma potential and the potential difference between the plasma and the r-f power electrode, respectively) on eta is, then, compared with experimental results. The following conclusions are found: 1. The plasma potential does not necessarily have a simple harmonic form, even if the supplied RF power has that form. 2. The DC parts of the plasma potential and the RF power electrode potential change depending on the waveform of the supplied RF power, even if the RF amplitude and eta are kept constant. 3. -dV/sub p/ D/dU/sub p/ depends quadratically on eta, with a proportionality constant K which depends on the waveform of the supplied r-f power.

• Research Organization: Massachusetts Inst. of Tech., Cambridge (USA). Dept. of Chemistry
• OSTI ID: 6317412
• Report Number(s): AD-A-181065/4/XAB
• Resource Relation: Other Information: Pub. in Japanese Jnl. of Applied Physics, Vol. 25, No. 10, 1569-1574(Oct 1986)
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
PLASMA SHEATH
DIRECT CURRENT
ELECTRICAL PROPERTIES
ELECTRODES
ETCHING
GASES
IONS
LOW PRESSURE
CHARGED PARTICLES
CURRENTS
ELECTRIC CURRENTS
FLUIDS
PHYSICAL PROPERTIES
SURFACE FINISHING
640410* - Fluid Physics- General Fluid Dynamics