Methods for calibration of standard leaks
The Sandia Laboratories Standards Department is currently using the comparison, P..delta..V and accumulate-dump methods to calibrate standard leaks. The comparison method may be used in the range from 10/sup -5/ to 10/sup -8/ atm cm/sup 3//s with a maximum uncertainty of 10%. The P..delta..V method can be used for fundamental calibration of faster leaks in the range from 10/sup -3/ to 10/sup -5/ atm cm/sup 3//s with a maximum uncertainty of 5%. Finally the accumulate-dump method can be used to fundamentally calibrate leaks in the range from 10/sup -4/ to 10/sup -10/ atm cm/sup 3//s with uncertainties ranging from 5 to 20%. Thus the purpose of this paper is to introduce three calibration methods with an analysis of the errors involved. These methods are reviewed and compared with other leak calibration methods currently in use.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6292400
- Report Number(s):
- SAND-81-1452C; CONF-811113-3; ON: DE81030211
- Resource Relation:
- Conference: American Vacuum Society national symposium, Anaheim, CA, USA, 3 Nov 1981
- Country of Publication:
- United States
- Language:
- English
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