Specimen-exchange device for an ultra-high vacuum atom-probe field-ion microscope
Conference
·
OSTI ID:6291417
A specimen-exchange device is described for an ultra-high vacuum field-ion microscope (FIM). This device completely eliminates the long pump-down period that is required if the FIM chamber is brought back to atmospheric pressure. The pressure in an air-lock is reduced to 10/sup -6/ Torr before the exchange takes place and the pressure in the FIM chamber remains below 10/sup -7/ Torr during the exchange and it drops to less than 3 x 10/sup -9/ Torr within 15 minutes after the exchange.
- Research Organization:
- Cornell Univ., Ithaca, NY (USA). Dept. of Materials Science and Engineering; Cornell Univ., Ithaca, NY (USA). Materials Science Center
- DOE Contract Number:
- EY-76-S-02-3158
- OSTI ID:
- 6291417
- Report Number(s):
- COO-3158-64; TRN: 79-014006
- Country of Publication:
- United States
- Language:
- English
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OSTI ID:6291417