Sputtered amorphous silicon solar cells. Final report, 22 July 1982-22 July 1983
This document reports on research conducted to further develop reactive sputtering of amorphous silicon solar cell applications. The major goals of the program were to develop intrinsic material capable of generating a short-circuit current density of 12 to 13 mA/cm/sup 2/ and an open-circuit voltage of 0.9; to investigate the mechanism of doping of sputtered a-SiH/sub x/ and ..mu..c-SiH/sub x/ films and develop methods to dope these layers; to investigate the origin of the low fill factor; to demonstrate a complete p-i-n solar cell structure fabricated totally from silicon targets, without any gas-phase toxic dopants; and to fabricate p-i-n solar cells having efficiencies of 6% or larger. Results showed that the properties of intrinsic and doped sputtered amorphous silicon films can be optimized to produce high-efficiency cells. The photovoltaic properties of the intrinsic films depended on structural and compositional inhomogeneities, amount of incorporated hydrogen, and low levels of dopant impurities. Amorphous and microcrystalline phosphorus- and boron-doped films were characterized through studies of their optical and transport properties; the superiority of the microcrystalline films for photovoltaic applications has been demonstrated. The 5.5% efficiency obtained with the p-i-n solar cell structures can be improved by depositing the three layers in sequential dedicated chambers and by such design concepts as back reflective contacts and transparent a-SiC front contacts.
- Research Organization:
- Exxon Research and Engineering Co., Annandale, NJ (USA)
- DOE Contract Number:
- AC02-83CH10093
- OSTI ID:
- 6284011
- Report Number(s):
- SERI/STR-211-2363; ON: DE84013002
- Resource Relation:
- Other Information: Portions are illegible in microfiche products. Original copy available until stock is exhausted
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SILICON SOLAR CELLS
PERFORMANCE
SPUTTERING
AMORPHOUS STATE
BORON
CRYSTAL DOPING
CRYSTAL GROWTH
FABRICATION
FILL FACTORS
PHOSPHORUS
THIN FILMS
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FILMS
NONMETALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMIMETALS
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion