Plasma-assisted deposition and characterization of Ti-containing diamondlike carbon coatings
- General Motors Research and Development Center, Warren, Michigan48090 (United States)
- Argonne National Laboratory, Argonne, Illinois60439 (United States)
We report on the synthesis of Ti-containing diamondlike hydrocarbon (Ti-DLC) coatings by plasma-assisted physical vapor deposition and the characterization of coating microstructure and mechanical properties. We find that Ti-DLC coatings with Ti compositions higher than 5.5 at.{percent} are composites consisting of nanocrystalline TiC in an amorphous hydrocarbon matrix. The hardness and elastic modulus of Ti-DLC coatings are found to increase monotonically with increasing Ti composition, while the ratio of the hardness to the modulus remains approximately constant. {copyright} {ital 1998 American Institute of Physics.}
- OSTI ID:
- 627962
- Journal Information:
- Journal of Applied Physics, Vol. 83, Issue 11; Other Information: PBD: Jun 1998
- Country of Publication:
- United States
- Language:
- English
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