Partial least-squares calibration diagnostics applied to the FT-IR analysis of borophosphosilicate glass (BPSG) thin films

Conference · Sun Jan 01 00:00:00 EST 1989

DOI:https://doi.org/10.1117/12.969531· OSTI ID:6263064

Haaland, D. M.

Full-spectrum multivariate calibration methods are capable of providing a multitude of diagnostic capabilities for evaluating the quality of the calibration, identifying problem calibration samples, and flagging unknown samples whose analysis by these methods might be unreliable. These diagnostics are demonstrated for the analysis of BPSG thin films on silicon using infrared spectroscopy and partial least-squares methods. 3 refs., 1 fig.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6263064
• Report Number(s): SAND-88-3367C; CONF-890674-2; ON: DE89014739
• Resource Relation: Journal Volume: 1145; Conference: 7. international conference on Fourier transform spectroscopy, Fairfax, VA, USA, 19 Jun 1989; Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
BOROPHOSPHATE GLASS
CHEMICAL COMPOSITION
BOROSILICATE GLASS
THIN FILMS
QUALITY CONTROL
CALIBRATION
DIAGNOSTIC USES
INFRARED SPECTRA
LEAST SQUARE FIT
CONTROL
FILMS
GLASS
MAXIMUM-LIKELIHOOD FIT
NUMERICAL SOLUTION
SPECTRA
USES
400102* - Chemical & Spectral Procedures
360602 - Other Materials- Structure & Phase Studies