Excimer laser assembly and an optic mount therefor
A mirror mount is described for use with an excimer laser assembly comprising a laser vessel with a pressurized interior containing a lasing cavity and a pair of mirrors aligned with each other and the cavity and located at opposite ends of the vessel for producing a laser beam, and a supporting frame; characterized in that the mount comprises a main member for securing to the supporting frame, and removable and replaceable means for ensuring accurate relocation of a said mirror in a predetermined orientation relative to said member, said orientation being independent of movement of the vessel ends; wherein the means for locating a said mirror in a predetermined orientation relative to said main member comprises a second member pivotally connected to the main member for adjustment about two mutually perpendicular axes that are both perpendicular to the axis of the laser beam.
- Assignee:
- IMS; EDB-93-122243
- Patent Number(s):
- US 5237583; A
- Application Number:
- PPN: US 7-783234
- OSTI ID:
- 6253640
- Resource Relation:
- Patent File Date: 28 Oct 1991
- Country of Publication:
- United States
- Language:
- English
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