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Title: Excimer laser assembly and an optic mount therefor

Abstract

A mirror mount is described for use with an excimer laser assembly comprising a laser vessel with a pressurized interior containing a lasing cavity and a pair of mirrors aligned with each other and the cavity and located at opposite ends of the vessel for producing a laser beam, and a supporting frame; characterized in that the mount comprises a main member for securing to the supporting frame, and removable and replaceable means for ensuring accurate relocation of a said mirror in a predetermined orientation relative to said member, said orientation being independent of movement of the vessel ends; wherein the means for locating a said mirror in a predetermined orientation relative to said main member comprises a second member pivotally connected to the main member for adjustment about two mutually perpendicular axes that are both perpendicular to the axis of the laser beam.

Inventors:
Publication Date:
OSTI Identifier:
6253640
Patent Number(s):
US 5237583; A
Application Number:
PPN: US 7-783234
Assignee:
IMS; EDB-93-122243
Resource Type:
Patent
Resource Relation:
Patent File Date: 28 Oct 1991
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; EXCIMER LASERS; LASER MIRRORS; SUPPORTS; DESIGN; LASER CAVITIES; LASER RADIATION; POSITIONING; ELECTROMAGNETIC RADIATION; GAS LASERS; LASERS; MECHANICAL STRUCTURES; MIRRORS; RADIATIONS; 426002* - Engineering- Lasers & Masers- (1990-)

Citation Formats

Brimacombe, R K. Excimer laser assembly and an optic mount therefor. United States: N. p., 1993. Web.
Brimacombe, R K. Excimer laser assembly and an optic mount therefor. United States.
Brimacombe, R K. 1993. "Excimer laser assembly and an optic mount therefor". United States.
@article{osti_6253640,
title = {Excimer laser assembly and an optic mount therefor},
author = {Brimacombe, R K},
abstractNote = {A mirror mount is described for use with an excimer laser assembly comprising a laser vessel with a pressurized interior containing a lasing cavity and a pair of mirrors aligned with each other and the cavity and located at opposite ends of the vessel for producing a laser beam, and a supporting frame; characterized in that the mount comprises a main member for securing to the supporting frame, and removable and replaceable means for ensuring accurate relocation of a said mirror in a predetermined orientation relative to said member, said orientation being independent of movement of the vessel ends; wherein the means for locating a said mirror in a predetermined orientation relative to said main member comprises a second member pivotally connected to the main member for adjustment about two mutually perpendicular axes that are both perpendicular to the axis of the laser beam.},
doi = {},
url = {https://www.osti.gov/biblio/6253640}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {8}
}