Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations
- Department of Electrical Engineering and Computer Science and the Electronics Research Laboratory, University of California, Berkeley, Berkeley, California 94720 (United States)
- Lawrence Livermore National Laboratory, Livermore, California 94550 (United States)
Weakly ionized processing plasmas are studied in two dimensions using a bounded particle-in-cell (PIC) simulation code with a Monte Carlo collision (MCC) package. The MCC package models the collisions between charged and neutral particles, which are needed to obtain a self-sustained plasma and the proper electron and ion energy loss mechanisms. A two-dimensional capacitive radio-frequency (rf) discharge is investigated in detail. Simple frequency scaling laws for predicting the behavior of some plasma parameters are derived and then compared with simulation results, finding good agreements. It is found that as the drive frequency increases, the sheath width decreases, and the bulk plasma becomes more uniform, leading to a reduction of the ion angular spread at the target and an improvement of ion dose uniformity at the driven electrode.
- DOE Contract Number:
- FG03-90ER54079
- OSTI ID:
- 6232199
- Journal Information:
- Physics of Fluids B; (United States), Vol. 5:7; ISSN 0899-8221
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
COLLISIONAL PLASMA
ELECTRIC DISCHARGES
RADIOWAVE RADIATION
SCALING LAWS
ENERGY LOSSES
MONTE CARLO METHOD
NUMERICAL SOLUTION
PLASMA SHEATH
TWO-DIMENSIONAL CALCULATIONS
CALCULATION METHODS
ELECTROMAGNETIC RADIATION
LOSSES
PLASMA
RADIATIONS
700390* - Other Plasma Physics Studies- (1992-)