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Title: Interfacial force sensor with force-feedback control

Conference ·
OSTI ID:6226235

A new interfacial force microscope capable of measuring the forces between two surfaces over the entire range of surface separations, up to contact, has been developed. The design is centered around a differential capacitance displacement sensor where the common capacitor plate is supported by torsion bars. A force-feedback control system balances the interfacial forces at the sensor, maintaining the common capacitor plate at its rest position. This control eliminates the instability which occurs with the conventional cantilever-based force sensors when the attractive force gradient exceeds the mechanical stiffness of the cantilever. The ability to measure interfacial forces at surface separations smaller than this instability point using the feedback control is demonstrated. 11 refs., 3 figs.

Research Organization:
Sandia National Labs., Albuquerque, NM (USA)
Sponsoring Organization:
DOE/DP
DOE Contract Number:
AC04-76DP00789
OSTI ID:
6226235
Report Number(s):
SAND-90-2558C; CONF-901244-3; ON: DE91004897
Resource Relation:
Conference: 1990 international electron device conference, San Francisco, CA (USA), 10-12 Dec 1990
Country of Publication:
United States
Language:
English