skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films. [C; graphite]

Abstract

The graphite macroparticle filtering efficiency of three different magnetic filter designs (straight duct, toroidal duct, and 90[degree] free-standing solenoid) used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon (ta-C) films was investigated. The particle contents in the coatings were measured using scanning electron microscopy (SEM) technique. In addition, during the ta-C deposition, long time exposure photographs were taken to see the graphite macroparticle trajectories and thus to qualitatively evaluate the filtering performance of different magnetic filters. The particle density measurements from the SEM images show that the filtering efficiency of the 90[degree] free-standing solenoid design is 13 times better than the filtering efficiency of the straight duct design. However, the toroidal duct design had only 3 times higher filtering efficiency compared to the straight duct design. [copyright] [ital 1999 American Vacuum Society.]

Authors:
; ; ;  [1]
  1. (Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States))
Publication Date:
OSTI Identifier:
6192177
Alternate Identifier(s):
OSTI ID: 6192177
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology, A
Additional Journal Information:
Journal Volume: 17:5; Journal ID: ISSN 0734-2101
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; AMORPHOUS STATE; CARBON; DESIGN; ELECTRIC ARCS; GRAPHITE; MAGNETIC FILTERS; PARTICLE SIZE; SCANNING ELECTRON MICROSCOPY; THIN FILMS; CURRENTS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRON MICROSCOPY; ELEMENTS; FILMS; FILTERS; MICROSCOPY; MINERALS; NONMETALS; SIZE 360601* -- Other Materials-- Preparation & Manufacture; 661200 -- Techniques of General Use in Physics-- (1992-)

Citation Formats

Hakovirta, M., Walter, K.C., Wood, B.P., and Nastasi, M. Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films. [C; graphite]. United States: N. p., 1999. Web. doi:10.1116/1.582009.
Hakovirta, M., Walter, K.C., Wood, B.P., & Nastasi, M. Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films. [C; graphite]. United States. doi:10.1116/1.582009.
Hakovirta, M., Walter, K.C., Wood, B.P., and Nastasi, M. Wed . "Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films. [C; graphite]". United States. doi:10.1116/1.582009.
@article{osti_6192177,
title = {Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films. [C; graphite]},
author = {Hakovirta, M. and Walter, K.C. and Wood, B.P. and Nastasi, M.},
abstractNote = {The graphite macroparticle filtering efficiency of three different magnetic filter designs (straight duct, toroidal duct, and 90[degree] free-standing solenoid) used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon (ta-C) films was investigated. The particle contents in the coatings were measured using scanning electron microscopy (SEM) technique. In addition, during the ta-C deposition, long time exposure photographs were taken to see the graphite macroparticle trajectories and thus to qualitatively evaluate the filtering performance of different magnetic filters. The particle density measurements from the SEM images show that the filtering efficiency of the 90[degree] free-standing solenoid design is 13 times better than the filtering efficiency of the straight duct design. However, the toroidal duct design had only 3 times higher filtering efficiency compared to the straight duct design. [copyright] [ital 1999 American Vacuum Society.]},
doi = {10.1116/1.582009},
journal = {Journal of Vacuum Science and Technology, A},
issn = {0734-2101},
number = ,
volume = 17:5,
place = {United States},
year = {1999},
month = {9}
}