Enhanced secondary electron yield from oxidized regions on amorphous carbon films studied by x-ray spectromicroscopy. [C]

Journal Article · Wed Sep 01 00:00:00 EDT 1999 · Journal of Vacuum Science and Technology, A

DOI:https://doi.org/10.1116/1.581938· OSTI ID:6189754

Diaz, J; Anders, S; Cossy-Favre, A ^[1]; Samant, M; Stoehr, J ^[2]

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1. Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)
2. IBM Research Division, Almaden Research Center, San Jose, California 95120 (United States)

Photoemission electron spectromicroscopy with synchrotron radiation has been used to study the correlation between the chemical surface composition and secondary electron yield from the surface of amorphous carbon films. Regions of about 4 [mu]m diam were found which exhibited up to ten times higher secondary electron emission than the rest of the film. Near edge x-ray absorption fine structure spectroscopy of these regions showed that they contained highly oxidized carbon in the form of carboxylic and carbonate groups. These observations might be linked to the field emission properties of these films. [copyright] [ital 1999 American Vacuum Society.]

• OSTI ID: 6189754
• Journal Information: Journal of Vacuum Science and Technology, A, Vol. 17:5; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AMORPHOUS STATE
CARBON
ELECTRON EMISSION
MICROSCOPY
OXIDATION
SECONDARY EMISSION
SYNCHROTRON RADIATION
THIN FILMS
X-RAY SPECTROSCOPY
BREMSSTRAHLUNG
CHEMICAL REACTIONS
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
FILMS
NONMETALS
RADIATIONS
SPECTROSCOPY
360606* - Other Materials- Physical Properties- (1992-)
665100 - Nuclear Techniques in Condensed Matter Physics - (1992-)