Interplay between computer simulation and transport theory in the analysis of ion-beam-induced collision processes in solids

Journal Article · Mon May 01 00:00:00 EDT 1989 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575894· OSTI ID:6165544

Sigmund, P

A brief summary is given of recent work on five loosely connected topics within atomic collisions in solids: (i) preferential recoil implantation in multicomponent targets, (ii) pronounced nonlinear behavior of atomic collision sequences induced by keV heavy ions, (iii) linear and nonlinear effects induced by cluster bombardment, (iv) round robin computer simulation of ejection probability in sputtering, and (v) depth of origin and angular spectrum of sputtered atoms. A common theme is the mutual stimulation between a purely numerical approach and theoretical reasoning, the relative weight of the two approaches being different from item to item.

• Research Organization: Fysisk Institut, Odense Universitet, DK-5230 Odense M, Denmark
• OSTI ID: 6165544
• Journal Information: J. Vac. Sci. Technol., A; (United States), Vol. 7:3
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ION COLLISIONS
MATHEMATICAL MODELS
ANGULAR DISTRIBUTION
CLUSTER BEAMS
COMPUTERIZED SIMULATION
EMISSION SPECTRA
ION IMPLANTATION
NONLINEAR PROBLEMS
SPUTTERING
TRANSPORT THEORY
BEAMS
COLLISIONS
DISTRIBUTION
SIMULATION
SPECTRA
656003* - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)