Evaluation of mechanical properties of tin films by ultra-low load indentation

Conference · Sun Jan 01 00:00:00 EST 1989

OSTI ID:6163095

O'Hern, M E; Parrish, R H; Oliver, W C

The mechanical properties of titanium nitride films of varying composition deposited on stainless steel substrates were studied using an indentation technique with a mechanical properties microprobe which allows measurement of film properties without contribution from the substrate material. A polishing technique was developed that gave consistent indentation measurements on films with initially rough surfaces. The elastic modulus increases linearly with increasing nitrogen content in the N:Ti range of 0.5 to 1.05, while the hardness of the film depends on other factors. Possible factors contributing to the hardness of the films are discussed. 14 refs., 4 figs., 1 tab.

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 6163095
• Report Number(s): CONF-890468-2; ON: DE89009618
• Resource Relation: Conference: 16. international conference on metallurgical coatings and equipment exhibit, San Diego, CA, USA, 17 Apr 1989; Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
TITANIUM NITRIDES
MECHANICAL PROPERTIES
ELASTICITY
HARDNESS
MORPHOLOGY
POLISHING
STAINLESS STEELS
SUBSTRATES
THIN FILMS
ALLOYS
FILMS
HIGH ALLOY STEELS
IRON ALLOYS
IRON BASE ALLOYS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
STEELS
SURFACE FINISHING
TENSILE PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360203* - Ceramics
Cermets
& Refractories- Mechanical Properties
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication