Differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope

Journal Article · Sat Sep 01 00:00:00 EDT 1979 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1135998· OSTI ID:6060064

Amano, J; Seidman, D N

An ultrahigh-vacuum (UHV) differentially pumped low-energy (50--3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at approx. =10/sup -7/ Torr. In the case of helium ion irradiation the optimum ion-current density was approx. =0.5 ..mu..A cm/sup -2/ for 300-eV He/sup +/ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5 x 10/sup -7/ to approx. =3 x 10/sup -10/ Torr in the atom-probe FIM chamber was 0.5 h.

• Research Organization: Department of Materials Science and Engineering and the Materials Science Center, Bard Hall, Cornell University, Ithaca, New York 14853
• OSTI ID: 6060064
• Journal Information: Rev. Sci. Instrum.; (United States), Vol. 50:9
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
ION MICROSCOPES
ION BEAMS
ION SOURCES
VACUUM PUMPS
APERTURES
ATOMS
HIGH VACUUM
IRRADIATION
MAGNETIC ANALYZERS
MASS SPECTROMETERS
PROBES
ULTRAHIGH VACUUM
BEAM ANALYZERS
BEAMS
LABORATORY EQUIPMENT
MEASURING INSTRUMENTS
MICROSCOPES
OPENINGS
PUMPS
SPECTROMETERS
440300* - Miscellaneous Instruments- (-1989)