Synthesis of ZrO{sub 2} and Y{sub 2}O{sub 3}-doped ZrO{sub 2} thin films using self-assembled monolayers
- Case Western Reserve Univ., Cleveland, OH (United States). Dept. of Materials Science and Engineering
Undoped or Y{sub 2}O{sub 3}-doped ZrO{sub 2} thin films were deposited on self-assembled monolayers (SAMs) with either sulfonate or methyl terminal functionalities on single-crystal silicon substrates. The undoped films were formed by enhanced hydrolysis of zirconium sulfate (Zr(SO{sub 4}) {center_dot} 4H{sub 4}O) solutions in the presence of HCl at 70 C. Typically, these films were a mixture of two phases: nanocrystalline tetragonal- (t-) ZrO{sub 2} and an amorphous basic zirconium sulfate. However, films with little or no amorphous material could be produced. The mechanism of film formation and the growth kinetics have been explained through a coagulation model involving homogeneous nucleation, particle adhesion, and aggregation onto the substrate. Annealing of these films at 500 C led to complete crystallization to t-ZrO{sub 2}. Amorphous Y{sub 2}O{sub 3}-containing ZrO{sub 2} films were prepared from a precursor solution containing zirconium sulfate, yttrium sulfate (Y{sub 2}(SO{sub 4}){sub 3} {center_dot} 8H{sub 2}O), and urea (NH{sub 2}CONH{sub 2}) at pH 2.2--3.0 at 80 C. These films also were fully crystalline after annealing at 500 C.
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- OSTI ID:
- 605747
- Journal Information:
- Journal of the American Ceramic Society, Vol. 80, Issue 12; Other Information: PBD: Dec 1997
- Country of Publication:
- United States
- Language:
- English
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