Characterization of Nb/AlO/sub x-/Al/Nb junction structures by anodization spectroscopy

Conference · Wed Mar 01 00:00:00 EST 1989 · IEEE Trans. Magn.; (United States)

OSTI ID:6044393

Imamura, T; Hasuo, S

The thin tunneling barrier in Nb/AlOx-Al/Nb Josephson junction was characterized by anodization spectroscopy. The authors' studies focus on Nb/AlOx and Al/Nb interfaces in Nb/AlOx-Al/Nb structures made by varying certain process parameters. The interface quality is greatly affected by film thickness, layer sequence, annealing, and existence of a thin oxide. Anodization spectroscopy is a useful technique to diagnose the tunneling barrier in the Nb/AlOx-Al/Nb Josephson junctions during fabrication processes.

• Research Organization: Fujitsu Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-01 (JP)
• OSTI ID: 6044393
• Report Number(s): CONF-880812-
• Journal Information: IEEE Trans. Magn.; (United States), Vol. 25:2; Conference: Applied superconductivity conference, San Francisco, CA, USA, 21 Aug 1988
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
36 MATERIALS SCIENCE
ALUMINIUM OXIDES
SUPERCONDUCTIVITY
NIOBIUM OXIDES
SUPERCONDUCTING JUNCTIONS
DESIGN
FABRICATION
INTERFACES
JOSEPHSON JUNCTIONS
PARAMETRIC ANALYSIS
SPECTROSCOPY
THICKNESS
THIN FILMS
TUNNELING
ALUMINIUM COMPOUNDS
CHALCOGENIDES
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
FILMS
JUNCTIONS
NIOBIUM COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTORY METAL COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
420201* - Engineering- Cryogenic Equipment & Devices
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties