Reactive magnetron sputtering of thin-film superconductor YBa/sub 2/Cu/sub 3/O/sub 7//sub -//sub x/

Journal Article · Mon Oct 26 00:00:00 EST 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98682· OSTI ID:6041081

Char, K; Kent, A D; Kapitulnik, A; Beasley, M R; Geballe, T H

Superconducting thin films of YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ have been successfully made by co-sputtering from the three targets in an Ar and O/sub 2/ mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1 x 10/sup 5/ A/cm/sup 2/ at 78 K and 2 x 10/sup 6/ A/cm/sup 2/ at 4.2 K. Highly oriented thin films have been obtained on SrTiO/sub 3/ /100/ substrates.

• Research Organization: Department of Applied Physics, Stanford University, Stanford, California 94305
• OSTI ID: 6041081
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 51:17
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
CRITICAL CURRENT
CURRENT DENSITY
SPUTTERING
TRANSITION TEMPERATURE
COPPER OXIDES
STRONTIUM OXIDES
COATINGS
SUPERCONDUCTING FILMS
FABRICATION
TITANIUM OXIDES
YTTRIUM OXIDES
ANNEALING
ARGON
EXPERIMENTAL DATA
OXYGEN
THIN FILMS
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
CURRENTS
DATA
ELECTRIC CURRENTS
ELEMENTS
FILMS
FLUIDS
GASES
HEAT TREATMENTS
INFORMATION
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE GASES
STRONTIUM COMPOUNDS
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity