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Title: Sputtering of molecules from ZnS, CdS, and FeS sub 2

Conference ·
OSTI ID:6000485
 [1]; ; ; ;  [2]
  1. California Inst. of Tech., Pasadena, CA (USA). Dept. of Applied Physics
  2. Argonne National Lab., IL (USA)

An open question remains as to whether molecules form as a result of simultaneous ejection of neighboring atoms from a solid or because of a molecular band that exists in the solid metal target before sputtering. This was addressed by sputtering experiments using a binary target, where the constituents of the sputtered molecules may not occupy nearest neighbor sites in the crystal. A study was conducted on single crystals of three metal-sulfides with two different lattice structures, using laser post-ionization mass spectrometry to detect neutral sputtered species. The single crystals used for these experiments were synthetically grown CdS and ZnS with the Wurtzite structure, and natural FeS{sub 2} with the cubic structure. The FeS{sub 2} samples were ultrasonically cleaned with trichloroethane, acetone, and methanol before insertion in the uhv chamber. The latter two solvents were used to clean CdS and ZnS. In sputtering metal sulfides of different structures, sputtered molecules with constituents that do not have a bond in the solid were observed. In the case of the metal dimers, the sputtered atom exceeds in number the metal dimer, whereas S is predominantly sputtered as S{sub 2} from all three samples. The results presented in this paper also suggest that some form of recombination mechanism (inside or outside the solid) is responsible for formation of molecules. Our data also show that the sputtered molecules form a significant percentage of the sputtered species. Therefore, it is important for quantitative analyses to obtain an accurate measure of molecular sputtering yields. 20 refs., 3 figs. (DP)

Research Organization:
Argonne National Lab., IL (USA)
Sponsoring Organization:
USDOE; USDOE, Washington, DC (USA)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
6000485
Report Number(s):
ANL/CP-71709; CONF-901105-111; ON: DE91010279
Resource Relation:
Conference: Fall meeting of the Materials Research Society, Boston, MA (USA), 24 Nov - 1 Dec 1990
Country of Publication:
United States
Language:
English